Aerotech's ABRS series rotary
air-bearing stages provide superior angular positioning, velocity stability,
and error motion performance in an exceptionally low-profile package. The ABRS
is designed to meet the exacting requirements of wafer inspection, high precision
metrology, x-ray diffraction systems, optical inspection and fabrication, and
MEMS/nanotechnology device fabrication.
Compact Package
The design of the ABRS series direct-drive rotary stage has been optimized to
minimize stage height. The low profile of the stage reduces the effective working
height of the system, minimizing "stack-up" related errors. In addition
to the low overall height, the ABRS series provides a clear aperture that can
be used for product feed-through, laser beam delivery, cable clearance, or application-specific
requirements.
Superior Mechanical
Design
The ABRS design features large air-bearing surfaces for high stiffness and load
capacity, producing not only excellent axial and radial error motions, but outstanding
tilt error motion, as well. The resultant face error motion is significantly
better than other rotary air-bearing tables and spindles, greatly benefiting
applications requiring exceptional planar performance.
Brushless Direct-Drive
To maximize positioning performance, the ABRS series utilizes Aerotech's
S-series slotless, brushless motor. The motor uses an advanced magnetic circuit
design to produce high torque output with minimal heat generation. The slotless
design is inherently zero cogging and torque-ripple free. This makes the ABRS
stages ideal for applications requiring smooth scan velocities at low or high
speeds.
Accurate Positioning
An optical encoder is standard with the ABRS. When coupled with Aerotech's
feedback multipliers and controls, resolutions of <0.03 arc second are achievable.
Custom Designs
Custom versions of the ABRS are available for rate table and inertial guidance
test-stand applications.
