Aerotech - Precision Positioning Systems and Motion Control. Aerotech has over 35 years of experience as a manufacturer of top quality motion control products and positioning systems to medical, industrial, research, educational, and government customers.
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Herausgegeben April/2003

ASR2000 High-Speed Spindle for Wafer Inspection

  • High-speed brushless servomotor

  • Instrument grade precision ABEC-7 angular contact
        bearings

  • Balanced to ISO 1940 G 1.0

  • High acceleration capability -- 6000 rpm in <1 second

  • Custom configurations available

  • Aerotech's ASR series direct-drive spindles were designed to provide superior angular positioning and velocity control for applications including disk drive testing, imaging applications, and precision wafer inspection.

    Superior Mechanical Design
    Matched angular contact bearing sets minimize spindle error motions. In addition, the ASR2000 is balanced to ISO 1940 G 1.0 tolerances. This unique design includes externally accessible balancing screws that can be adjusted with final payload in place. The design also uses labyrinth-type sealing to minimize particle migration from the spindle, resulting in certification for Class 1 cleanroom operation. An integral rotary union is provided for a vacuum supply.

    Brushless Direct Drive
    To maximize positioning performance, the ASR series utilizes Aerotech's brushless motor technology. These motors have all the advantages of a brushless direct-drive motor - no brushes to wear, and high acceleration and high speeds. With its low inherent inertia and high torque output, the ASR is capable of extremely high speeds and accelerations. In addition, the efficient electromagnetic design provides high performance with lower operating temperatures than comparable products.

    Accurate Positioning
    With a velocity ripple of <0.1%, a total radial error motion <3 µm, and total axial error motion <1.5 µm, the Aerotech spindle offers superior performance for high accuracy applications. The high performance motor and rotary encoder are directly coupled to a common shaft. The absence of gear trains and mechanical couplings means no position errors caused by hysteresis, windup, or backlash.

    Flexible Configurations
    Options include mechanical or vacuum chuck configurations. Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.


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    Aerotech ist Hersteller von Motion Control und Positioniersystemen.