The ANT130-L series stages offer nanometer-level
performance in travels up to 160 mm. With its low profile and
outstanding performance characteristics, the ANT130-L is the
ultimate solution for high-accuracy alignment, inspection,
positioning, and measurement stations.
Noncontact Direct-Drive
The linear motor drive also offers the advantage of higher
speeds and accelerations. The compact yet powerful linear
motor drives the ANT130-L to a peak unloaded acceleration
of 1 g and a maximum velocity of 350 mm/s. The result is a
high-accuracy device with outstanding throughput that
significantly outperforms comparable high-accuracy screw-driven
or other stages in its class.
Outstanding Resolution
For alignment applications, outstanding step-to-step resolution
is critical. The ANT130-L meets this demand with an
incremental step size of 1 nm when coupled with Aerotech
drives and controls. The direct-drive linear motor allows the
ANT130-L to make precise, small resolution steps. This is
particularly important in alignment applications where step
accuracy is critical.
Designed for Long Life
Like all stages in the Aerotech product family, the ANT130-L
was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices,
which means they not only exhibit long-life but are totally
maintenance free.
Precision Alignment
ANT130-L series stages are easily configured as XY
assemblies. Options include precision orthogonality alignment
to 5 arc seconds and vertical axis solutions.
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