| Rotation Angle |
20° |
20° |
180° |
180° |
±360° Continuous |
±360° Continuous |
| Accuracy(1) |
10 arc sec |
3 arc sec |
10 arc sec |
3 arc sec |
10 arc sec |
3 arc sec |
| Resolution |
0.01 arc sec |
0.01 arc sec |
0.01 arc sec |
0.01 arc sec |
0.01 arc sec |
0.01 arc sec |
| Repeatability (Bi-Directional)(1) |
1.5 arc sec |
1.5 arc sec |
1.5 arc sec |
1.5 arc sec |
1.5 arc sec |
1.5 arc sec |
| Repeatability (Uni-Directional) |
0.5 arc sec |
0.5 arc sec |
0.5 arc sec |
0.5 arc sec |
0.5 arc sec |
0.5 arc sec |
| Tilt Error Motion |
Synchronous |
NA |
NA |
NA |
NA |
10 arc sec |
10 arc sec |
| Asynchronous |
NA |
NA |
NA |
NA |
3 arc sec |
3 arc sec |
| Axial Error Motion(1) |
Synchronous |
NA |
NA |
NA |
NA |
2 μm |
2 μm |
| Asynchronous |
NA |
NA |
NA |
NA |
0.5 μm |
0.5 μm |
| Radial Error Motion(1) |
Synchronous |
NA |
NA |
NA |
NA |
3 μm |
3 μm |
| Asynchronous |
NA |
NA |
NA |
NA |
1 μm |
1 μm |
| Maximum Speed |
20 rpm |
20 rpm |
20 rpm |
20 rpm |
200 rpm |
200 rpm |
| Maximum Acceleration |
400 rad/s2 |
400 rad/s2 |
400 rad/s2 |
400 rad/s2 |
400 rad/s2 |
400 rad/s2 |
| In-Position Stability(2) |
0.005 arc sec |
0.005 arc sec |
0.005 arc sec |
0.005 arc sec |
0.005 arc sec |
0.005 arc sec |
| Aperture |
11 mm |
11 mm |
11 mm |
11 mm |
11 mm |
11 mm |
| Maximum Torque (Continuous) |
0.2 Nm |
0.2 Nm |
0.2 Nm |
0.2 Nm |
0.2 Nm |
0.2 Nm |
| Load Capacity(3) |
Axial |
3.0 kg (6.6 lb) |
3.0 kg (6.6 lb) |
3.0 kg (6.6 lb) |
3.0 kg (6.6 lb) |
3.0 kg (6.6 lb) |
3.0 kg (6.6 lb) |
| Radial |
2.0 kg (4.4 lb) |
2.0 kg (4.4 lb) |
2.0 kg (4.4 lb) |
2.0 kg (4.4 lb) |
2.0 kg (4.4 lb) |
2.0 kg (4.4 lb) |
| Moment |
3 Nm |
3 Nm |
3 Nm |
3 Nm |
3 Nm |
3 Nm |
| Rotor Inertia (Unloaded) |
0.001 kg-m2 |
0.001 kg-m2 |
0.001 kg-m2 |
0.001 kg-m2 |
0.0016 kg-m2 |
0.0016 kg-m2 |
| Stage Mass |
1.5 kg (3.3 lb) |
1.5 kg (3.3 lb) |
1.5 kg (3.3 lb) |
1.5 kg (3.3 lb) |
1.7 kg (3.74 lb) |
1.7 kg (3.74 lb) |
| Material |
Aluminum Body/Black Hardcoat Finish |
| MTBF (Mean Time Between Failure) |
30,000 Hours |
Notes:
1. Certified with each stage. Requires the use of an Aerotech controller.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
• All error motion specifications are measured at 60 rpm.
• For high speed operation, customer payload must be balanced to G1.0 per ISO 1940
| Drive
System |
Slotless, Brushless, Direct-Drive Rotary Motor |
| Feedback |
Noncontact
Rotary Encoder |
| Maximum
Bus Voltage |
±40 VDC |
| Limit
Switches |
5 V,
Normally Closed |
| Home
Switch |
Near
Center |
| Multi-Axis |
A3200 |
Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH |
| Ensemble |
Epaq MXR
Epaq MR-MXH
Ensemble ML-MXH |
| Single
Axis |
Soloist |
Soloist
ML-MXH |
Notes:
1. Linear
amplifiers are required to achieve the listed specifications. Other options are
available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Sales Engineering for more information.

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