| Travel |
60 mm |
60 mm |
110 mm |
110 mm |
| Accuracy(1) |
±3.5 µm
(±140 µin) |
±250 nm
(±10 µin) |
±5.0 µm
(±200 µin) |
±300 nm
(±12 µin) |
| Resolution |
1 nm |
1 nm |
1 nm |
1 nm |
| Repeatability (Bi-Directional) (1) |
±100 nm |
±50 nm |
±100 nm |
±50 nm |
| Straightness(1) |
±1.5 µm
(±60 µin) |
±1.5 µm
(±60 µin) |
±2.0 µm
(±80 µin) |
±2.0 µm
(±80 µin) |
| Flatness(1) |
±1.75 µm
(±70 µin) |
±1.75 µm
(±70 µin) |
±2.5 µm
(±100 µin) |
±2.5 µm
(±100 µin) |
| Pitch |
10 arc
sec |
10 arc
sec |
12 arc
sec |
12 arc
sec |
| Roll |
10 arc
sec |
10 arc
sec |
12 arc
sec |
12 arc
sec |
| Yaw |
5 arc sec |
5 arc sec |
6 arc sec |
6 arc sec |
| Orthogonality |
10 arc
sec |
3 arc sec |
10 arc
sec |
3 arc sec |
| Maximum
Speed |
350 mm/s
(14 in/s)
(Upper Axis) |
350 mm/s
(14 in/s)
(Upper Axis) |
350 mm/s
(14 in/s)
(Upper Axis) |
350 mm/s
(14 in/s)
(Upper Axis) |
| Maximum
Acceleration |
1 g - 10
m/s2 (No Load) (Upper Axis) |
1 g - 10
m/s2 (No Load) (Upper Axis) |
1 g - 10
m/s2 (No Load) (Upper Axis) |
1 g - 10
m/s2 (No Load) (Upper Axis) |
| Speed
Stability |
See graph
for typical performance |
| Settling
Time |
See graph
for typical performance |
| In-Position
Stability(2) |
3 nm |
3 nm |
3 nm |
3 nm |
| Maximum
Force (Continuous) |
23 N |
23 N |
23 N |
23 N |
| Load
Capacity(3) |
Horizontal |
12.0 kg
(26.5 lb) |
12.0 kg
(26.5 lb) |
12.0 kg
(26.5 lb) |
12.0 kg
(26.5 lb) |
| Moving
Mass |
Upper |
1.5 kg
(3.3 lb) |
1.5 kg
(3.3 lb) |
2.1 kg
(4.6 lb) |
2.1 kg
(4.6 lb) |
| Lower |
4.2 kg
(9.2 lb) |
4.2 kg
(9.2 lb) |
5.7 kg
(12.5 lb) |
5.7 kg
(12.5 lb) |
| Stage
Mass |
5.5 kg
(12.1 lb) |
5.5 kg
(12.1 lb) |
7.4 kg
(16.3 lb) |
7.4 kg
(16.3 lb) |
| Material |
Aluminum
Body/Black Hardcoat Finish |
| MTBF
(Mean Time Between Failure) |
30,000
Hours |
Notes:
1.
Certified with each stage.
2.
In-Position Jitter listing is 3 sigma value.
3. Axis
orientation for on-axis loading is listed.
4.
Specifications are for single-axis systems measured 25 mm above the tabletop.
Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
5. -H requires the use of an Aerotech controller.
| Travel |
160 mm |
160 mm |
| Accuracy(1) |
±7.0 µm
(±280 µin) |
±300 nm
(±12 µin) |
| Resolution |
1 nm |
1 nm |
| Repeatability (Bi-Directional) (1) |
±100 nm |
±50 nm |
| Straightness(1) |
±2.5 µm
(±100 µin) |
±2.5 µm
(±100 µin) |
| Flatness(1) |
±3.0 µm
(±120 µin) |
±3.0 µm
(±120 µin) |
| Pitch |
15 arc
sec |
15 arc
sec |
| Roll |
15 arc
sec |
15 arc
sec |
| Yaw |
8 arc sec |
8 arc sec |
| Orthogonality |
10 arc
sec |
3 arc sec |
| Maximum
Speed |
350 mm/s
(14 in/s)
(Upper Axis) |
350 mm/s
(14 in/s)
(Upper Axis) |
| Maximum
Acceleration |
1 g - 10
m/s2 (No Load)
(Upper Axis) |
1 g - 10
m/s2 (No Load)
(Upper Axis) |
| Speed
Stability |
See graph
for typical performance |
| Settling
Time |
See graph
for typical performance |
| In-Position
Stability(2) |
3 nm |
3 nm |
| Maximum
Force (Continuous) |
23 N |
23 N |
| Load Capacity(3) |
Horizontal |
12.0 kg
(26.5 lb) |
12.0 kg
(26.5 lb) |
| Moving
Mass |
Upper |
2.4 kg
(5.3 lb) |
2.4 kg
(5.3 lb) |
| Lower |
6.9 kg
(15.2 lb) |
6.9 kg
(15.2 lb) |
| Stage
Mass |
8.9 kg
(19.6 lb) |
8.9 kg
(19.6 lb) |
| Material |
Aluminum
Body/Black Hardcoat Finish |
| MTBF
(Mean Time Between Failure) |
30,000
Hours |
Notes:
1.
Certified with each stage.
2.
In-Position Jitter listing is 3 sigma value.
3. Axis
orientation for on-axis loading is listed.
4.
Specifications are for single-axis systems measured 25 mm above the tabletop.
Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
5. -H
requires the use of an Aerotech controller.
| Drive
System |
Brushless
Linear Servomotor |
| Feedback |
Noncontact
Linear Encoder |
| Maximum
Bus Voltage |
±40 VDC |
| Limit
Switches |
5 V,
Normally Closed |
| Home
Switch |
Near
Center |
| Multi-Axis |
A3200 |
Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH |
| Ensemble |
Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH |
| Single
Axis |
Soloist |
Soloist
ML-MXH |
Notes:
1. Linear
amplifiers are required to achieve the listed specifications. Other options are
available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Sales Engineering for more information.
|
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