Home >> Dual-Axis Linear Nanopositioners

Aerotech’s dual-axis linear nanopositioners include the ANT95-XY and ANT130-XY. Both of these crossed-roller bearing, direct-drive, dual-axis linear stages offer 1 nm resolution, <1 nm in-position stability, and two-dimensional accuracy of ±250 nm. The ANT95-XY offers travels of 25 x 25 or 50 x 50 mm and loads of 4.0 or 6.0 kg, while the ANT130-XY offers travels of 60, 110, and 160 mm and loads to 12 kg. They are designed to be equally at home in the laboratory or 24/7 manufacturing environment.

Outstanding accuracy, position repeatability, and in-position stability require high system resolution. The ANT95-XY and ANT130-XY 1 nm minimum incremental step size provides this high level of performance. Excellent in-position stability, assisted by high-quality, anti-creep crossed-roller bearings, enables virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Aerotech nanopositioners are offered as stand-alone units, or as part of a complete positioning package that includes Aerotech’s own controls and drives.

Die Aerotech NanoTranslationstische ANT mit Kreuzrollenlagern, Linearmotor sind XY-Positioniersysteme und die neueste Weiterentwicklung unserer ANT Serie. Der ANT95-XY und ANT95-XY-H erlauben zweidimensionales Positionieren (X und Y). Das Design ist mit 60mm sehr flach gehalten. Diese Tische sind direktangetrieben, haben kontaktlose Linearencoder, Limits, integriertes Kabelmanagement und sind in zwei Genauigkeitsgraden erhältlich.

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Die Aerotech XY-NanoTranslationstische ANT130-XY mit Kreuzrollenlagern, Linearmotoren sind XY-Positioniersysteme und setzen die Entwicklung unserer ANT Serie fort. Der ANT130-XY und der ANT130-XY-H bestehen aus einem Dreiplatten-Design und ermöglichen einen zweidimensionalen (XY) Verfahrbereich. Das Design ist mit 85mm sehr flach gehalten und ist in Verfahrvarianten von 60 x 60 mm, 110 x 110 mm und 160 x 160 mm verfügbar.

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5 nm Auflösung (die beste seiner Klasse)

Minimale inkrementelle Bewegung des ANT95-XY

1 nm Auflösung (die beste seiner Klasse)

Aerotech’s ANT95-XY-ULTRA is a long travel (up to 50 mm x 50 mm) nanopositioner for XY applications. Each axis uses crossed-roller bearings, as well as Aerotech’s unique direct-drive for non-cogging, zero backlash motion. In addition, each stage receives a two-dimensional correction to achieve unmatched nanometer resolution, accuracy, and repeatability.

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Aerotech’s ANT130-XY-ULTRA is a long travel (up to 160 mm x 160 mm) nanopositioner for XY applications. Each axis uses crossed-roller bearings, as well as Aerotech’s unique direct-drive for non-cogging, zero backlash motion. In addition, each stage receives a two-dimensional correction to achieve unmatched nanometer resolution, accuracy, and repeatability.

Click here for complete product information.

1 nm Best-In-Class Resolution

1 nm step plot for ANT95-XY-ULTRA

1 nm Best-In-Class Resolution


5 nm step plot for ANT130-XY-ULTRA