| Total
Travel |
200 mm x
200 mm
(8 in x 8 in) |
300 mm x
300 mm
(12 in x 12 in) |
400 mm x
400 mm
(16 in x 16 in) |
500 mm x
500 mm
(20 in x 20 in) |
| Drive
System(1) |
Lower Axis |
Linear
Brushless Servomotor — Dual BLMC-267-A or Dual BLM-264-A |
| Upper Axis |
Linear
Brushless Servomotor — BLMC-192-A |
| Bus
Voltage |
Up to 340
VDC |
| Feedback |
Noncontact
Linear Encoder |
| Resolution(2) |
0.001
µm - 1.0 µm (0.04 µin - 40 µin) |
| Maximum
Travel Speed(3) |
3 m/s (120
in/s) |
| Maximum
Linear Acceleration |
5 g (50
m/s2) (no-load) |
| Maximum
Load(4) |
15.0 kg
(33 lb) |
| Accuracy(5,6) |
±1.0 µm
(±40 µin) |
±1.25 µm
(±50 µin) |
±1.25 µm
(±50 µin) |
±1.5 µm
(±60 µin) |
| Repeatability |
±0.3 µm
(±12 µin) |
±0.4 µm
(±16 µin) |
±0.4 µm
(±16 µin) |
±0.5 µm
(±20 µin) |
| Orthogonality |
5 arc sec |
| Moving
Mass |
Lower Axis |
29.0 kg |
31.0 kg |
34.0 kg |
37.0 kg |
| Upper Axis |
3.2 kg |
| Material |
Aluminum |
| Finish |
Stage |
Black
Anodize; ESD Optional |
| Carriage |
Black Hard
Coat; ESD Optional |
